Description: |
This undergraduate/graduate course presents a comprehensive introduction to the principles, materials, fabrication techniques, and applications of microelectromechanical systems (MEMS). Students will gain an in-depth understanding of principles for micro sensors and actuators. Integrated microfabrication techniques that originated from microelectronics, microfabrication, and coupled with new micromechanical fabrication techniques will be discussed. A review of several transduction principles will be dicscussed. Case reviews will cover several important and interdisciplinary device classes including micro sensors, microfluid systems, and applications of MEMS in nanotechnology. |
